Open Positions

PhD

Electrostatic MEMS generator/actuator of nanoforces traceable to electrical and mechanical quantities

Tutors: Dr. Luigi Ribotta (l.ribotta@inrim.it)

Prof. Stefano Stassi (stefano.stassi@polito.it)


Description and Objectives:

The measurement of small masses, and thus of small forces, in the range from pN to μN, is of great interest for various fields of science and technology, such as physics, biology, and materials science. 

Many devices sensitive to extremely small forces are based on the deflection of an elastic structure measured by a deformation sensor (e.g. piezoresistive, optical), which however relies on non-linear effects difficult to characterise.

One strategy to provide traceability in the field of small forces has been the development of electrostatic balances, in which the weight force is equal to the electrostatic force. The realisation of a MEMS generator/actuator will allow the measurements of nano-forces traceable to the SI through the conversion of electrical into mechanical quantities.

More specifically, the candidate will have to design, model and fabricate an electrostatic MEMS with a comb structure, in collaboration with CNR-IMM Bologna.

In addition, the candidate will have to implement a set-up for the characterization of the electrostatic behavior of the MEMS sensor, based on a piezoelectric actuator for traceable displacement measurements and electronic devices to measure/generate voltage and capacitance signals.


Skills and competencies for the development of the activity:

The candidate must have a basic knowledge on the microfabrication processes, such as photolithography, thin film deposition and etching.

Furthermore, a basic knowledge of the following software is preferable (not strictly required):

• COMSOL Multiphysics, for the simulation of the MEMS devices;

• LabVIEW software, for data acquisition and control of instruments of the MEMS characterization set-up.

Fundings: INRiM - Next-Generation Metrology project

Location: INRiM – Turin

Collegio: INGEGNERIA ELETTRICA, ELETTRONICA E DELLE COMUNICAZIONI (IEEC) – Politecnico di Torino


https://www.polito.it/didattica/dottorato-di-ricerca-e-scuola-di-specializzazione/ammissione-al-dottorato/ammissione/bando-di-concorso/borse-a-tematica-vincolata-di-ingegneria-elettrica-0

Thesis/Internship

Our open positions are available for Master Thesis, Bachelor Thesis and/or Internship.

 Proposals are devoted to students from:

https://www.inrim.it/en/services/training/internships-and-theses



Topography of electric contact on solar cell

Study of Functional Surfaces 

Surfaces describe the interface between two states of matter (typically between a solid and a fluid), and their analysis allows us to understand how an object interacts with the external environment. The irregularities present on the surface determine the shape, waviness, and surface finish, which are described by numerical parameters such as the roughness of a profile or the texture of a surface area. Since the mechanical, chemical-physical, and functional properties of an object are strongly dependent on the surface, surface metrology is essential for quantitatively studying the correlation between morphology and functionality of materials through the development and implementation of data evaluation methods. The internship will take place in the Surface Metrology and Dimensional Nanometrology laboratory at INRiM and will focus on measuring the topography of surfaces at the micro and nanoscale using confocal/interferometric optical microscopes, stylus profilometers, and AFM (atomic force microscopy). The case studies will range from surfaces from various industrial sectors (such as automotive, aerospace, energy, fashion, environment, health) to nanostructures, nanoparticles, and biological samples.


https://fisica.campusnet.unito.it/do/documenti.pl/Show?_id=ehmc

Micromachined proof mass interleaved with capacitive sensors (Courtesy of STMicroelectronics)  

Characterisation of the electrostatic behaviour of MEMS nanoforces sensors

Microelectromechanical systems (MEMS) are microscopic devices incorporating both mechanical and electronic parts, and can be used as active (actuators) or passive (sensors) disposals. MEMS have several different geometries and are used in a large field of applications (e.g. accelerometers, gyroscopes, barometers, magnetometers, bio-MEMS, MEMS inertial navigation systems, ultrasound transducers, etc.).

In our study, we focus on MEMS generator/actuator of nanoforces with electrostatic-comb geometry, which consists of two opposing capacitor armatures with a comb structure for increasing capacitor capacity and actuator stroke.

The project aims to build a facility capable of characterizing the electrostatic behavior of MEMS traceable to the SI. In particular, the force-amplitude transduction is characterized by using an interferometrically calibrated piezoelectric actuator for displacement measurements and by an electronic setup to measure/generate the voltage and capacitance signals.

Spline filter implementation ISO 16610

Algorithms for surface and image processing in dimensional metrology 

Dimensional metrology, is the application of metrology for quantifying the physical size, form (shape), of any given feature by using measuring instruments or machines. This internship will focus on the development of a software that implements the movement of a 3 axis interferometric measuring machine for diameter and optical scale calibration. 

Prerequisites

Implementation of a program for a

3 axis measuring machine

Dimensional metrology, is the application of metrology for quantifying the physical size, form (shape), of any given feature by using measuring instruments or machines. This internship will focus on the development of a software that implements the movement of a 3 axis interferometric measuring machine for diameter and optical scale calibration. 

Prerequisites